SEMICONDUCTOR

MICROELECTRONICS & FIBER OPTIC

Our inspection and testing services assure that high purity gas cabinets, panels, filter skids, gas sticks, components, tool systems, laterals, or mains are fabricated and installed in accordance with project specifications and tested to the required performance criteria for leak rate, particle, and impurity concentration.

MICROELECTRONICS & FIBER OPTIC

Our inspection and testing services assure that high purity gas cabinets, panels, filter skids, gas sticks, components, tool systems, laterals, or mains are fabricated and installed in accordance with project specifications and tested to the required performance criteria for leak rate, particle, and impurity concentration.

TESTING

Inboard Helium Leak Testing / Mass Spectrometer Leak Testing (MSLT)

We specialize in MSLT inboard leak testing on high purity gas systems, stainless steel carrier chemical systems, delivery equipment, filter skids, and HI-VAC systems to ensure the helium leak rate meets or exceeds the engineering design. Inboard (system under vacuum) leak test services may be provided for leak rates from -12 to -5 mbar l/s He range.

Outboard Helium Leak Testing / Mass Spectrometer Leak Testing (MSLT)

We perform outboard leak testing / MSLT on operational facility helium systems to locate leaks in systems, transfer lines, tools, and equipment to eliminate atmospheric contamination, reduce helium loss, and save facility operating capital. Outboard (system pressurized with helium) leak testing should be carefully considered with regards to sensitivity and feasibility for new system certification even when referenced by ASME B31.3 Chapter X

Particle Testing

We specialize in real time particle count testing on pressurized high purity gas systems and distribution equipment. Our test procedure measures the test flow rate to ensure specified velocities or Reynolds numbers per the engineering design. Sample volumes are tested per system specification at particle channel thresholds of 0.1, 0.2, 0.3, 0.5, 1.0, 5.0 μm.

Moisture and Oxygen Testing

We specialize in real time trace H2O and O2 testing on pressurized high purity gas systems and distribution equipment. QAM’s UHP Analytical Test Cart doubles testing productivity and onboard data acquisition provides test data and trending graphs. H2O and O2 analyzers have an operating range from single digit ppb to lower ppm range including dew point measurements from -110°C to 20°C (–166°F to 68°F). See Compressed Air Testing for other test ranges.

impurity testing

We specialize in impurity testing for additional gas matrix impurities such as carbon monoxide (CO), hydrogen (H2), methane (CH4), carbon dioxide (CO2), and Non-methane hydrocarbons (NMHC) with RCP and FID analyzers. The on-site sample is collected in a prepared 1.5 liter sample cylinder, shipped to QAM, and analyzed on the RCP/FID analyzer system. There are test gas type and shipping restrictions. Analyzer operating range is single digit ppb to 5 ppm.

Resources

STAFF

Our management team and technicians have the industry experience to perform any high purity testing scope of work. Troubleshooting techniques along with proven procedures, equipment resources, data acquisition, and electronic reporting capabilities provide the highest level of certification testing for process tool qualification, system, or equipment commissioning.

equipment

MS-Leak and analytical testing equipment is maintained by our full time Equipment Manager ensuring equipment is operating to OEM specifications and is calibrated in accordance with our Quality System and manufacturer’s recommendations

FABRICATION & INSTALLATION SURVEILLANCE

MATERIALS OF CONSTRUCTION

Fabricator material receipt, examination, and control processes are audited to assure the correct materials are issued for fabrication and installation.

WELDING procedure specification

Auto-GTAW process WPS/PQR is evaluated for conformance to ASME Section IX and/or project specification and approved by project engineering.

Welding Operator Performance Qualification

Auto-GTAW process WOPQ is evaluated for conformance to ASME Section IX and project specific qualification testing requirements.

purge & welding backing gas

Gas sources including purifiers, jumpers, and point of use filters are field verified for compliance with the project specifications to ensure purity levels are met which will reduce certification testing time.

Welding Surveillance

Verify weld sample coupons are made in accordance with project requirements. Verify that UHP procedures are followed during construction, and welding and weld repairs are performed per project specifications.

PVDF, PP, and PFA Welding

Welding machine and welder qualifications are verified to the requirements of the manufacturer. Weld machine parameters are verified on a weld for weld basis as part of the weld inspection process.

WELDING INSPECTION & SYSTEM VERIFICATION

Weld Inspection (SS, PVDF, PP, PFA)

Production welds are inspected by direct visual based on the project inspection plan and evaluated to the project weld acceptance criteria. Weld documentation is verified to the requirements of the project specifications. Plastic welding is verified to the machine weld report / documentation as this is a critical part of the inspection process.

Installation Verification (IV)

Final inspection of the system is a critical construction process. Systems are inspected for routing, hangers, labels, source, and POC tie-in per drawings. The IV process produces a punch or task list requiring corrective action and re-inspection or verification before sign off.

Pressure Test Verification

The pressure test is verified for conformance to the project specification regarding test gauge, approved media, test pressure, duration, criteria, and documentation.

TURNOVER PACKAGE

Certification Testing TOP

The TOP content is determined by the contractual scope of work, however it will contain testing equipment calibration documents, MSLT reports, particle analysis test reports, and analytical test report with trend graphs.